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IL150 Quartz Crystal
Growth Rate Monitor
The IL150 is an eight layer monitor that can interface
to two sensor heads and provides RS232 communication. Resolution
is 0.1nm for most of the materials and the unit is extremely robust
making it ideal for sputter applications. Thickness and rate are
calculated from user supplied data on density and acoustic impedance
of the film material. Data for up to eight materials is stored
in non volatile memory.
Two sensor heads can be attached to the unit and
used either as back-up or, alternatively, as the primary sensor
for the particular
film being deposited.
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The user can also specify a tooling factor to compensate for differences
in detector/substrate geometry.
Deposition may be automatically terminated at a specified thickness
by remote operation of a shutter. A particular feature of the IL150
is that it is capable of displaying both positive and negative shifts.
This
enables the instrument to be used in certain etching operations and
also allows the operator to observe and therefore compensate for flash-heating
effects.
Complete
Package Offer - £1,995 !!!
Why
not simply buy the complete kit, everything you need to get started
at a special cut down price. Comes complete with a manual containing
comprehensive assembly instructions.
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Kit
contains:
- IL150
Quartz Crystal Growth Rate Monitor
- Sensor Head
with 30 inch x 3/16 inch dia cooling tubes
- 1 inch bolt
baseplate feedthrough with 3/16 inch dia cooling tubes
- Swagelok
fittings for the above
- 6 MHz Oscillator
- Complete
cable set
- 1 packet
of 10 crystals - High precision Gold coated 6MHz SN66HG
- Manual containing
full assembly and operation instructions
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Note:
All prices given above are Ex-Works and are excluding VAT or other
duties that may be applicable
 Contact
us today for a quote...
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