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FTM6 and FTM7 Film Thickness Monitors


Intellemetrics offers refurbished (as new) FTM6 and FTM7 quartz crystal thickness monitors with a full 1 year warranty.


FTM6 Features & Benefits

• Easy to read LED display of film thickness
• Memory storage for 2 deposition materials
• Automatic shutter control
• Compact design

Display  
 Thickness display 0.0 nm – 999.9 micron
 Resolution 0.1 nm
 Display update rate 1 Hz
   
Material parameters  
   Layers 1 or 2
   Density 0.1 – 99.9 g cm-3
   Thickness termination 0.0 nm – 999.9 micron
   Tooling factor 0.01 – 99.9%
Sensor crystal operating range 5.1 – 6.1 MHz
Shutter relay rating 220 Vdc, 2A or 250 Vac, 2A
Electrical supply voltage 50/60 Hz 110–120V, 220–240 V (±10%)
Electrical supply current 9W
Dimensions 110 x 105 x 185 mm
Weight 1.6 kg

 


FTM6


FTM7 Features & Benefits

• Easy to read LED display of film thickness & deposition rate
• Memory storage for 11 deposition materials
• Dual crystal holder / dual shutter control facility
• Tooling factor and acoustic impedance error correction
• Auto-sequence mode for simplified multilayer deposition
• RS232 interface

Display  
 Thickness display 0.0 nm – 999.9 micron
 Rate display 0.0 – 999.9 nm-1
 Resolution 0.1 nm
 Display update rate 1 - 4 Hz
   
Material parameters  
   Layers 1 to 11
   Density 0.1 – 99.9 g cm-3
   Thickness termination 0.0 nm – 999.9 micron
   Film Acoustic Impedance 1 – 99.9 x 105 g cm-2 s-1
   Tooling factor 0.01 – 99.9%
Sensor crystal operating range 5.1 – 6.1 MHz
Shutter relay rating 220 Vdc, 2A or 250 Vac, 2A
Analogue Output 0 to 1 V, 1kohm
Electrical supply voltage 50/60 Hz 110–120V, 220–240 V (±10%)
Electrical supply current 50W
Dimensions 192 x 96 x 243 mm
Weight 2.9 kg

FTM7

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