intellevation
intellemetrics
Optical Monitoring For Plasma Etch & Thin Film Coating     

 

Home

About Us

Thin Film Coating
Optical Monitors

Plasma Etch
Depth Monitor

Crystal Monitors & Controllers

Contacts


PRODUCTS
Optical Monitors

Introduction

Product Range

Installation Base

Test Glass Changers

Increasing Performance & Manufacturing Yield

Benefits

Applications

Operation

Training & Support

 

Test Glass Changers

Intellevation has been making Test Glass Changers for a wide variety of coating systems for around 20 years. This experience results in Test Glass Changers which combine extreme robustness (important in a production coating environment) with high precision (important to achieve the highest optical monitoring performance).

Intellevation provides a range of Test Glass Changer options for its free space and its fibre based optical monitor systems. These designs are customised to your coating system geometry and coating scheme requirements. Our test glass changers are suitable for front face reflection, back face reflection or transmission optical monitoring modes. The systems are also designed so that optical alignment can be achieved from outside of the coating chamber, ideal for aligning under vacuum.

Our Test Glass Changers hold between 6 and 20 test glasses in a carousel configuration. Drop glass systems with 250 test glasses can be supplied as well.

Intellevation also supplies Test Glass Changers integrated with multiposition Quartz Crystal Changers for even higher levels of integration. Intellevation can supply the multiposition Crystal Changer or we are happy to integrate to your existing Crystal Changer.

Test Glass Changers are driven directly from the IL550 and IL560 series of Optical Monitors thereby providing a truly integrated and automated system. The test glass changes are programmed from within Intellevation's FilmMaker software and significantly increase the number and complexity of films achievable within a stack. Intellevation's FilmMaker and FilmSimulator software enables the coating engineer to design test glass changes into their coating scheme and also to predict the impact upon yield and precision.

Send our CAD team drawings of you system and we will be happy to advise on a suitable Test Glass Changer option.


Copyright © Intellevation Ltd 2006