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IL550 Series Benefits

The IL550 Series of Optical Monitors give thin-film engineers the tools to decrease process development time & manufacturing costs AND increase yield & product performance. The system combines advanced optoelectronic hardware with a suite of powerful software including FilmMaker©, FilmSimulator©, FilmDirector© and FilmReviewer© to provide a single complete integrated solution.

Real time, in-situ measurement and control with increased precision compared to Quartz Crystal. The Optical Monitor cuts each layer based on a true measurement of the Optical Thickness of that layer.

The system can either automatically make the cut or the user can take manual control - an ideal way to confidently progress from process development to automated manufacturing of complex precision optical components.

Reduced termination errors in QW stacks.

Automatic compensation for refractive index process variances.

In band measurement takes account of materials dispersion.

  
A user friendly Windows® driven interface is fast and intuitive. The system enables the choice of optimum monitor wavelength & test glass through inbuilt modeling.
Fast data acquisition and high noise rejection for accurate termination is achieved. The probe source is modulated to eliminate the background light from the chamber and to enhance the signal-to-noise ratio. Furthermore, the source reference signal is tapped off from the source module and fed directly into the detector via a fixed fibre optic cable. This removes effects on the data due to changes in the spectral output of the light source which occur over time. The result is a highly stable measurement system even in the most demanding environments.

FilmMaker© Software

Predictive modelling software – design a film structure from scratch and rapidly determine the optimum process conditions thereby reducing material waste & process development time.

Key Features

Modelling allows the selection of the optimum monitor wavelength & test glass for each layer.
Single data entry screen
Fast programming for QW stacks
On screen help prompts
Automatic & manual termination modes
Automatic gain setting


FilmSimulator© Software 

Includes a UNIQUE simulation capability enabling the user to perform a 'dummy' run using a pre-programmed film structure and incorporate the actual hardware filters, software filters, sampling rate, termination algorithm and include a programmable noise level to simulate a ‘real run’.

The following features can be programmed into the simulator to reflect real-life E-beam systems:

    Independant noise levels for each material.
    Programmable random deviation in refractive index.
    A random variation in photometric gain at each test glass change.

An essential process design tool reflecting the response on your actual system!


FilmDirector© Software

A fast and easy-to-use front-end that enables you to drive your process.

Loads a process from FilmMaker© and then performs the run under automatic or manual control as required. FilmDirector© automatically changes the wavelength and the test glass. It also detects each cut and controls the material sources and shutters through an advanced I/O capability.

Key Features

Incorporates advanced model fitting algorithms for cutpoint determination.
State machine based controller can recover/continue a process context even after a shutdown.
Integrates seamlessly with FilmMaker© design front-end.
Freely configurable, paneled user-interface.
Client–server architecture results in a software platform that is independent of the actual optical monitor hardware.
Exposes a standard COM/DCOM interface for remote operation by OEM equipment.

Now includes two operating modes.

ADVANCED mode for process developers allows access to all of the parameter space.

OPERATOR mode enables an ADVANCED user to lock and hide many of the advanced parameters thereby providing a clear front-end for a previously optimised process, ideal for use by operators in a manufacturing environment.

After a run is completed, the data is logged for later analysis. Files can be exported in CSV format for analysis in your favorite program.

FilmReviewer© Software

FilmReviewer© is used to view, analyse and reprocess previous runs.

Take REAL raw data from your coating system, and observe the effects of reprocessing it, changing the filtering parameters, the sampling rate, the latency and hold-off parameters and the termination algorithms.

Another powerful tool enabling process engineers to optimise their process in the fastest, cheapest and most efficient manner!


   
Integration to coating tools for automated operation
 
Remote control for through-wall cleanroom implementation. Log the data for subsequent analysis or offline SPC
   

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