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Optical Monitoring For Plasma Etch & Thin Film Coating     

 

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Optical Monitors

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Applications

Coatings for optical components vary dramaticaly in terms of complexity and required precision. Intellevation supplies monitoring solutions across the complexity range for applications from 300nm to beyond 12 microns.

Quartz crystal monitors measure the mass deposited and then the thickness is determined from a preprogrammed density. Quartz crystal monitors are therefore widely used to provide control of the deposition rate.

Optical Monitors directly measure the true optical thickness of the growing film and are therefore the preferred solution for a wide range of complex, or higher precision, thin film coating applications.

The intellemetrics IL550 Series has been successfully applied to;

Bandpass filters – WDM, NBF, BBF

Dichroic Beamsplitters – Colour Separators, Projector coatings 400nm to 1100nm

HEAR coatings – Laser diode 700nm to 1550nm

Long wave pass – 400nm to 5000nm

Short wave pass – 400nm to 5000nm

Optoelectronics

 Medical devices

 MEMS devices

 

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