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Optical Monitors Installation Base


Nordiko Technical Services Ltd, UK

Nordiko 3400 Broad Ion Beam Deposition system.

The 3400 is an advanced automatic vacuum coating system designed for the deposition of dielectric and metallic films. The module is equipped to be interfaced to a wafer handling platform (SEMI height). A single ion source illuminates the selected one, of four available, target positions creating a deposition flux. An auxiliary ion source aimed at the substrate table is available as an option that can be used for wafer pre-clean and/or direct illumination of the growing film.

And when customer's require increased precision and repeatability in optical coatings, an Intellemetrics optical monitor can be integrated.


 
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