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Etch Depth Monitor

The NEW LEP400 Etch Depth Monitor

Product Selection & Downloads

Applications

Benefits

Operation

 

Product Selection

The LEP400 Series comes in a number of different configurations to satisfy the etching needs of a wide range of diverse materials as well as the diverse needs of a wide range of applications - from flexible research and development labs to the stringent requirements of high volume production facilities.

Laser wavelength: The standard system utilises a 670nm laser but other wavelength options are available depending on the material system being etched.

Wavelengths available include 670nm, 905nm, 980nm, 1550nm.

Mounting System: The mounting system is designed to fit the LEP400 to your etch system. It includes;

  • A true kinematic mount to ensure true perpendicular alignment to the wafer. The kinematic mount comes with finger tip adjustment of precision thumbscrews with no tools required.
  • A mounting block which will align with fixings on your etch system.
  • A range of translation stage options to move the laser spot to the desired location on the wafer including....
 

Manual Stages

Compact side access X-Y stage
   > 15mm or 25mm travel
   > 1 micron resolution

 
 

Motorised Stages

25mm travel
1.3 micronrepeatability
Driven direct from Controller
Ideal for use with vision capture
Point, click and move option
Pattern recognition option

 
 
 

Handheld Remote Controller
Ideal for driving stages independantly of a PC
Controller can be handheld, fixed to the etch machine, or fixed to the controller PC in a through-the-wall environment.

 

Vision System: See the wafer in the etch chamber and the position of the laser spot. See features as small as 5 microns!
Align the laser spot to mask features.

 

Low Cost 9 inch B&W Monitor

 
 
 

15 inch colour LCD Monitor

Wide range of mounting options
Directly on to etch machine
In remote clean area
Next to system controller PC

 
 
 

Video Capture to controller display

Fully computer based option ideal for the totally integrated solution.

 

A range of other options are available for interfacing and integration into OEM plasma etch tools. Please contact our Technical Team to discuss your application.

Downloads

The following files are available for download in PDF format:

 
LEP300 Flier
 
LEP300 Technical Specification Sheet
 

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