PRODUCTS
Etch Depth Monitor
The
NEW LEP400 Etch Depth Monitor
Product
Selection & Downloads
Applications
Benefits
Operation
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Product
Selection
The
LEP400 Series comes in a number of different configurations to satisfy
the etching needs of a wide range of diverse materials as well as the
diverse needs of a wide range of applications - from flexible research
and development labs to the stringent requirements of high volume production
facilities.
Laser wavelength: The standard
system utilises a 670nm laser but other wavelength options are
available depending on the material system being etched.
Wavelengths
available include 670nm, 905nm, 980nm, 1550nm.
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Mounting System: The mounting
system is designed to fit the LEP400 to your etch system. It includes;
- A true kinematic
mount to ensure true perpendicular alignment to the wafer. The
kinematic mount comes with finger tip adjustment of precision
thumbscrews with no tools required.
- A mounting
block which will align with fixings on your etch system.
- A range of
translation stage options to move the laser spot to the desired
location on the wafer including....
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Manual
Stages
Compact side
access X-Y stage
> 15mm or 25mm travel
> 1 micron resolution
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Motorised
Stages
25mm travel
1.3 micronrepeatability
Driven direct from Controller
Ideal for use with vision capture
Point, click and move option
Pattern recognition option
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Handheld Remote
Controller
Ideal for driving stages independantly of a PC
Controller can be handheld, fixed to the etch machine, or fixed
to the controller PC in a through-the-wall environment.
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Vision System: See the wafer in the etch chamber and the
position of the laser spot. See features as small as 5 microns!
Align the laser spot to mask features.
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Low
Cost 9 inch B&W Monitor
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15
inch colour LCD Monitor
Wide range
of mounting options
Directly on to etch machine
In remote clean area
Next to system controller PC
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Video
Capture to controller display
Fully computer
based option ideal for the totally integrated solution.
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A
range of other options are available for interfacing and integration into
OEM plasma etch tools. Please contact our Technical
Team to discuss your application.
Downloads
The following files
are available for download in PDF format:
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