The IL150 is an eight layer monitor that can interface to two sensor heads and provides RS232 communication. Resolution is 0.1nm for most of the materials and the unit is extremely robust making it ideal for sputter applications. Thickness and rate are calculated from user supplied data on density and acoustic impedance of the film material. Data for up to eight materials is stored in non volatile memory.

Two sensor heads can be attached to the unit and used either as back-up or, alternatively, as the primary sensor for the particular film being deposited. The user can also specify a tooling factor to compensate for differences in detector/substrate geometry.

Deposition may be automatically terminated at a specified thickness by remote operation of a shutter.